Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480978 | Method for inspecting flow rate controller and method for processing workpiece | Kumiko Ono | 2019-11-19 |
| 10410840 | Gas supplying method and semiconductor manufacturing apparatus | Tomoyuki Mizutani | 2019-09-10 |
| 10269539 | Plasma processing method | Kumiko Ono, Koichi Nagami | 2019-04-23 |
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Wataru Ozawa, Akihiro Sakamoto +2 more | 2019-02-12 |