Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2019-02-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Wataru Ozawa, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2019-02-12 |