Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Kimihiro Fukasawa, Kazunori Kazama | 2019-04-09 |
| 10204763 | Plasma processing apparatus and plasma processing method | Takao FUNAKUBO, Hirofumi Haga, Shinichi Kozuka, Akihiro Sakamoto, Naoki Taniguchi +2 more | 2019-02-12 |