Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Noriyuki Iwabuchi, Satoshi TODA, Tetsuro Takahashi | 2019-10-29 |
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Wataru Ozawa, Kimihiro Fukasawa | 2019-04-09 |