Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Kazunori Kazama, Noriyuki Iwabuchi, Tetsuro Takahashi | 2019-10-29 |
| 10256107 | Substrate processing method | Muneyuki Imai | 2019-04-09 |
| 10221109 | Method for producing alpha-olefin low polymer | Hiroki Emoto | 2019-03-05 |