Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Kazunori Kazama, Satoshi TODA, Tetsuro Takahashi | 2019-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460949 | Substrate processing apparatus, substrate processing method and storage medium | Hiroyuki Takahashi, Kazunori Kazama, Satoshi TODA, Tetsuro Takahashi | 2019-10-29 |