Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Wataru Ozawa, Kazunori Kazama | 2019-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254774 | Temperature control method, control apparatus, and plasma processing apparatus | Tatsuya Miura, Wataru Ozawa, Kazunori Kazama | 2019-04-09 |