Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504741 | Semiconductor manufacturing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Masahiro Tabata | 2019-12-10 |
| 10504745 | Method for processing target object | Yoshihide Kihara, Toru Hisamatsu | 2019-12-10 |
| 10460963 | Plasma processing method | Shuhei Ogawa, Wanjae Park, Yoshihide Kihara | 2019-10-29 |
| 10290468 | Electrode for plasma processing apparatus, plasma processing apparatus, plasma processing method and storage medium | Shinji Himori | 2019-05-14 |
| 10233535 | Plasma processing apparatus and plasma processing method | Yoshihide Kihara, Toru Hisamatsu | 2019-03-19 |