Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504741 | Semiconductor manufacturing method and plasma processing apparatus | Michiko Nakaya, Masanobu Honda, Toru Hisamatsu | 2019-12-10 |
| 10483118 | Etching method | Sho Kumakura | 2019-11-19 |
| 10475659 | Method of processing target object | Yoshihide Kihara | 2019-11-12 |
| 10381236 | Method of processing target object | Yoshihide Kihara, Toru Hisamatsu | 2019-08-13 |
| 10319613 | Method of selectively etching first region made of silicon nitride against second region made of silicon oxide | Sho Kumakura | 2019-06-11 |
| 10269578 | Etching method | Sho Kumakura | 2019-04-23 |
| 10217643 | Method of processing target object | Yoshihide Kihara | 2019-02-26 |