Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504741 | Semiconductor manufacturing method and plasma processing apparatus | Michiko Nakaya, Masanobu Honda, Masahiro Tabata | 2019-12-10 |
| 10504745 | Method for processing target object | Yoshihide Kihara, Masanobu Honda | 2019-12-10 |
| 10381236 | Method of processing target object | Yoshihide Kihara, Masahiro Tabata | 2019-08-13 |
| 10233535 | Plasma processing apparatus and plasma processing method | Yoshihide Kihara, Masanobu Honda | 2019-03-19 |