Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504745 | Method for processing target object | Toru Hisamatsu, Masanobu Honda | 2019-12-10 |
| 10475659 | Method of processing target object | Masahiro Tabata | 2019-11-12 |
| 10460963 | Plasma processing method | Shuhei Ogawa, Wanjae Park, Masanobu Honda | 2019-10-29 |
| 10381236 | Method of processing target object | Toru Hisamatsu, Masahiro Tabata | 2019-08-13 |
| 10233535 | Plasma processing apparatus and plasma processing method | Masanobu Honda, Toru Hisamatsu | 2019-03-19 |
| 10217643 | Method of processing target object | Masahiro Tabata | 2019-02-26 |