Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510512 | Methods and systems for controlling plasma performance | Megan Doppel, Kazuki Moyama, Chelsea DuBose, Justin Moses | 2019-12-17 |
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Megan Doppel, John Entralgo, Jianping Zhao, Toshihisa Nozawa | 2019-09-24 |
| 10395903 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Lee Chen | 2019-08-27 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Lee Chen, Zhiying Chen, Jianping Zhao | 2019-08-20 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Lee Chen, Barton Lane, Radha Sundararajan | 2019-07-16 |