Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Merritt Funk, Megan Doppel, John Entralgo, Toshihisa Nozawa | 2019-09-24 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Lee Chen, Zhiying Chen, Merritt Funk | 2019-08-20 |
| 10381745 | Beam forming network and base station antenna | Yang Geng, Guanxi Zhang | 2019-08-13 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Lee Chen, Merritt Funk, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Lee Chen, Barton Lane, Merritt Funk, Radha Sundararajan | 2019-07-16 |
| 10354837 | Controlling etch rate drift and particles during plasma processing | — | 2019-07-16 |
| 10333220 | Interleaved polarized multi-beam antenna | Yang Geng, Qingming Xie | 2019-06-25 |
| 10205236 | Antenna system | Xiaohui Ma | 2019-02-12 |