Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424462 | Multi-cell resonator microwave surface-wave plasma apparatus | Merritt Funk, Megan Doppel, John Entralgo, Jianping Zhao | 2019-09-24 |
| 10388557 | Placing bed structure, treating apparatus using the structure, and method for using the apparatus | Kohei Kawamura, Yasuo Kobayashi, Kiyotaka Ishibashi | 2019-08-20 |
| 10290523 | Wafer processing apparatus, recording medium and wafer conveying method | — | 2019-05-14 |
| 10262865 | Methods for manufacturing semiconductor devices | Atsuki Fukazawa | 2019-04-16 |