Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Lee Chen, Merritt Funk | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Lee Chen, Barton Lane, Merritt Funk | 2019-07-16 |