Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395903 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Merritt Funk | 2019-08-27 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Zhiying Chen, Jianping Zhao, Merritt Funk | 2019-08-20 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Merritt Funk, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Barton Lane, Merritt Funk, Radha Sundararajan | 2019-07-16 |