Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514612 | Method and system for overlay control | Yang-Hung Chang, Chih-Ming Ke | 2019-12-24 |
| 10461037 | Method for forming semiconductor device structure with overlay grating | Long Chen, Jia-Hong Chu, Chi-Wen Lai, Chia-Ching Liang, Yu-Ching Wang +4 more | 2019-10-29 |
| 10281827 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Chun-Ming Hu, Chih-Ming Ke | 2019-05-07 |
| 10204867 | Semiconductor metrology target and manufacturing method thereof | Long Chen, Jia-Hong Chu, Hsin-Chin LIN, Hsiang-Yu SU, Yun-Heng Tseng +4 more | 2019-02-12 |