Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10521548 | Forecasting wafer defects using frequency domain analysis | Che-Yuan Sun, Chih-Ming Ke, Chun-Ming Hu | 2019-12-31 |
| 10514612 | Method and system for overlay control | Chih-Ming Ke, Kai-Hsiung Chen | 2019-12-24 |
| 10281827 | Noise reduction for overlay control | Weimin Hu, Kai-Hsiung Chen, Chun-Ming Hu, Chih-Ming Ke | 2019-05-07 |