Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10521548 | Forecasting wafer defects using frequency domain analysis | Yang-Hung Chang, Che-Yuan Sun, Chih-Ming Ke | 2019-12-31 |
| 10281827 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Kai-Hsiung Chen, Chih-Ming Ke | 2019-05-07 |