Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10521548 | Forecasting wafer defects using frequency domain analysis | Yang-Hung Chang, Che-Yuan Sun, Chun-Ming Hu | 2019-12-31 |
| 10514612 | Method and system for overlay control | Yang-Hung Chang, Kai-Hsiung Chen | 2019-12-24 |
| 10281827 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Kai-Hsiung Chen, Chun-Ming Hu | 2019-05-07 |
| 10274839 | Two-dimensional marks | Wen-Zhan Zhou, Heng-Jen Lee, Chen-Ming Wang, Kai-Hsiung Cheng, Ho-yung David Hwang | 2019-04-30 |