Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461037 | Method for forming semiconductor device structure with overlay grating | Long Chen, Jia-Hong Chu, Chi-Wen Lai, Chia-Ching Liang, Kai-Hsiung Chen +4 more | 2019-10-29 |
| 10204867 | Semiconductor metrology target and manufacturing method thereof | Long Chen, Jia-Hong Chu, Hsiang-Yu SU, Yun-Heng Tseng, Kai-Hsiung Chen +4 more | 2019-02-12 |