Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kentaro Takahashi, Yuhki Kinpara, Shinichi Maeta, Mamoru Kosakai | 2019-11-12 |
| 10389278 | Electrostatic chuck device with multiple fine protrusions or multiple fine recesses | Yoshiaki Moriya | 2019-08-20 |