Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kazuto Ando, Kentaro Takahashi, Yuhki Kinpara, Mamoru Kosakai | 2019-11-12 |
| 10256131 | Electrostatic chuck device | Mamoru Kosakai, Keisuke Maeda | 2019-04-09 |