Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kazuto Ando, Kentaro Takahashi, Shinichi Maeta, Mamoru Kosakai | 2019-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kazuto Ando, Kentaro Takahashi, Shinichi Maeta, Mamoru Kosakai | 2019-11-12 |