Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502639 | Plate-shaped body for temperature measurement and temperature measuring apparatus provided with the same | Kazunori Ishimura, Takeshi Watanabe, Hitoshi Kouno, Ryuuji Hayahara | 2019-12-10 |
| 10475687 | Electrostatic chuck device | Yukio Miura | 2019-11-12 |
| 10475688 | Electrostatic chuck device, and semiconductor manufacturing device | Kazunori Ishimura, Kazuto Ando, Kentaro Takahashi, Yuhki Kinpara, Shinichi Maeta | 2019-11-12 |
| 10256131 | Electrostatic chuck device | Shinichi Maeta, Keisuke Maeda | 2019-04-09 |