Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10389278 | Electrostatic chuck device with multiple fine protrusions or multiple fine recesses | Kazuto Ando | 2019-08-20 |
| 10189745 | Corrosion-resistant member and electrostatic chuck device | Kentaro Takahashi, Megumi Ootomo | 2019-01-29 |