Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497599 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member | Kentaro Takahashi, Nobuhiro Hidaka, Hironori Kugimoto | 2019-12-03 |
| 10189745 | Corrosion-resistant member and electrostatic chuck device | Kentaro Takahashi, Yoshiaki Moriya | 2019-01-29 |