Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497599 | Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member | Megumi Ootomo, Kentaro Takahashi, Nobuhiro Hidaka | 2019-12-03 |