Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460921 | High lateral to vertical ratio etch process for device manufacturing | Kyeong-Tae Lee, Daehee Weon, Sang-jun Choi, Sreekar Bhaviripudi, Jahyong Kuh | 2019-10-29 |
| 10392559 | Preparation method of nanocrystals coated with metal-surfactant layers | Eun Joo JANG | 2019-08-27 |
| 10347500 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Byungkook Kong, Sang-jun Choi | 2019-07-09 |
| 10265742 | Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber | Kee Young Cho, Joo Won Han, Han Soo Cho | 2019-04-23 |