Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460921 | High lateral to vertical ratio etch process for device manufacturing | Kyeong-Tae Lee, Sang-wook Kim, Daehee Weon, Sreekar Bhaviripudi, Jahyong Kuh | 2019-10-29 |
| 10347500 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Byungkook Kong, Sang-wook Kim | 2019-07-09 |
| 10189947 | Composition of anti-reflective hardmask | — | 2019-01-29 |