Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10265742 | Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber | Kee Young Cho, Sang-wook Kim, Han Soo Cho | 2019-04-23 |
JH
Joo Won Han
Overall (2019): #409,695 of 560,194Top 75%
1
Patents 2019