Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10265742 | Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber | Sang-wook Kim, Joo Won Han, Han Soo Cho | 2019-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10265742 | Method for in-situ chamber clean using carbon monoxide (CO) gas utlized in an etch processing chamber | Sang-wook Kim, Joo Won Han, Han Soo Cho | 2019-04-23 |