Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Yungjun Kim, Ingi Kim +2 more | 2019-08-20 |
| 10361100 | Apparatus and methods for treating a substrate | Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim, Kuntack Lee +2 more | 2019-07-23 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park +2 more | 2019-01-22 |