Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Tae Hong Kim, Jung-Min Oh, Yungjun Kim, Ingi Kim, Boun Yoon +2 more | 2019-08-20 |