Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435234 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | Yong-Jhin Cho, In Kwang Bae, Mi Hyun Park, Kun-Tack Lee, Yong-Jun Choi | 2019-10-08 |
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Yungjun Kim, Ingi Kim, Boun Yoon +2 more | 2019-08-20 |
| 10249269 | System on chip devices and operating methods thereof | Sang Hee Kim, Jin Seok Ha, Min-Je Jun | 2019-04-02 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park +2 more | 2019-01-22 |