Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Yungjun Kim, Boun Yoon +2 more | 2019-08-20 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park, Jung-Min Oh +2 more | 2019-01-22 |