Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332762 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | Il-Sang Lee, In-Gi Kim, Kyoung Hwan Kim, Hyo-San Lee, Sang Won Bae +2 more | 2019-06-25 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Ingi Kim, Mihyun PARK, Ui-soon Park, Jung-Min Oh +2 more | 2019-01-22 |