Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2019-12-31 |
| 10443150 | Toroidal plasma processing apparatus with a shaped workpiece holder | Robert J. Basnett | 2019-10-15 |