Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276398 | High aspect ratio selective lateral etch using cyclic passivation and etching | Kwame Eason, Mark Kawaguchi, Seung Ho Park, Hsiao-Wei Chang | 2019-04-30 |
| 10192751 | Systems and methods for ultrahigh selective nitride etch | Dengliang Yang, Faisal Yaqoob, Helen Zhu, Joon Hong Park | 2019-01-29 |