Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283615 | Ultrahigh selective polysilicon etch with high throughput | Dengliang Yang, Kwame Eason, Joon Hong Park | 2019-05-07 |
| 10192751 | Systems and methods for ultrahigh selective nitride etch | Dengliang Yang, Pilyeon Park, Helen Zhu, Joon Hong Park | 2019-01-29 |