Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283615 | Ultrahigh selective polysilicon etch with high throughput | Dengliang Yang, Faisal Yaqoob, Joon Hong Park | 2019-05-07 |
| 10276398 | High aspect ratio selective lateral etch using cyclic passivation and etching | Pilyeon Park, Mark Kawaguchi, Seung Ho Park, Hsiao-Wei Chang | 2019-04-30 |