Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283615 | Ultrahigh selective polysilicon etch with high throughput | Kwame Eason, Faisal Yaqoob, Joon Hong Park | 2019-05-07 |
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Ilia Kalinovski, Haoquan Fang, David Cheung | 2019-04-23 |
| 10192751 | Systems and methods for ultrahigh selective nitride etch | Faisal Yaqoob, Pilyeon Park, Helen Zhu, Joon Hong Park | 2019-01-29 |