Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Dengliang Yang, Haoquan Fang, David Cheung | 2019-04-23 |
IK
Ilia Kalinovski
Overall (2019): #436,321 of 560,194Top 80%
1
Patents 2019