MK

Mark Kawaguchi

Lam Research: 1 patents #175 of 444Top 40%
Overall (2019): #359,816 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10276398 High aspect ratio selective lateral etch using cyclic passivation and etching Kwame Eason, Pilyeon Park, Seung Ho Park, Hsiao-Wei Chang 2019-04-30