Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510590 | Low resistivity films containing molybdenum | Shruti Vivek Thombare, Raashina Humayun, Michal Danek, Chiukin Steven Lai, Joshua Collins +3 more | 2019-12-17 |
| 10388546 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Nicholas Muga Ndiege, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2019-08-20 |
| 10373806 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Martin E. Freeborn, Bart J. van Schravendijk | 2019-08-06 |
| 10262943 | Interlevel conductor pre-fill utilizing selective barrier deposition | Artur Kolics, William T. Lee, Larry Zhao, Derek Wong, Praveen Nalla +2 more | 2019-04-16 |
| 10246774 | Additive for ALD deposition profile tuning in gap features | — | 2019-04-02 |