Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373806 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2019-08-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373806 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2019-08-06 |