AS

Akhil Singhal

Lam Research: 1 patents #175 of 444Top 40%
Overall (2019): #553,436 of 560,194Top 100%
1
Patents 2019

Issued Patents 2019

Patent #TitleCo-InventorsDate
10373806 Apparatus and method for deposition and etch in gap fill Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk 2019-08-06