Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373806 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2019-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373806 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2019-08-06 |