Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Yukinao KAGA, Hideharu Itatani, Hiroshi Ashihara | 2019-08-20 |
| 10361084 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system | Hiroshi Ashihara, Kimihiko NAKATANI | 2019-07-23 |
| 10355098 | Method of manufacturing semiconductor device | Motomu DEGAI, Masanori NAKAYAMA, Masahito Kitamura | 2019-07-16 |