Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Hideharu Itatani, Hiroshi Ashihara | 2019-08-20 |
| 10366894 | Method of manufacturing semiconductor device, substrate processing device, and recording medium | Arito OGAWA | 2019-07-30 |