Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Yukinao KAGA, Hideharu Itatani | 2019-08-20 |
| 10388762 | Method of manufacturing semiconductor device | Masahito Kitamura | 2019-08-20 |
| 10361084 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system | Kazuhiro Harada, Kimihiko NAKATANI | 2019-07-23 |
| 10297440 | Method of manufacturing semiconductor device | Hirohisa Yamazaki, Noriyuki Isobe | 2019-05-21 |